The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2025
Filed:
Sep. 08, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventor:
Vijay D. Parkhe, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); H01J 37/32724 (2013.01);
Abstract
Exemplary substrate support assemblies may include an electrostatic chuck body defining a substrate support surface. The support assemblies includes a support stem coupled with the electrostatic chuck body. The support assemblies includes an electrode embedded within the electrostatic chuck body proximate the substrate support surface. The support assemblies includes a ground electrode embedded within the electrostatic chuck body. The support assemblies includes one or more channels formed within the electrostatic chuck body between the electrode and the ground electrode.