The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2025
Filed:
Aug. 16, 2024
Applicant:
Ksm Component Co., Ltd., Gimpo-si, KR;
Inventors:
Yun Ho Kim, Gimpo-si, KR;
Joo Hwan Kim, Gimpo-si, KR;
Hwan Young Park, Gimpo-si, KR;
Bo Sung Kim, Gimpo-si, KR;
Hyun Taek Lee, Gimpo-si, KR;
Assignee:
KSM COMPONENT CO., LTD., Gimpo-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C04B 35/117 (2006.01); C04B 41/00 (2006.01); C04B 41/50 (2006.01); C04B 41/87 (2006.01); H01J 37/32 (2006.01); H01L 21/48 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32724 (2013.01); C04B 35/117 (2013.01); C04B 41/009 (2013.01); C04B 41/5045 (2013.01); H01J 37/32495 (2013.01);
Abstract
A ceramic susceptor is disclosed, which not only has excellent volumetric resistance at high temperatures and thermal conductivity at room temperature compared to conventional ceramic susceptors, but also has excellent plasma resistance without peeling of the coating layer even in high temperature environments, and thus has the effect of reducing particles.