The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2025
Filed:
Aug. 22, 2023
Semes Co., Ltd., Cheonan-si, KR;
Jong Seok Seo, Cheonan-si, KR;
SEMES CO., LTD., Cheonan-si, KR;
Abstract
Proposed is an apparatus for processing substrates and a facility for processing substrates including a heating unit. The heating unit includes a heating plate provided in a heating space to heat a substrate while supporting the substrate; and a fixing portion configured to fix a position of the heating plate, wherein the fixing portion includes a plurality of fixing members spaced at regular intervals along a circumference of the heating plate, and the position of the heating plate may be fixed using a magnetic attraction of a magnetic member. At this time, the center position of the heating plate is fixed by the fixing members using the attraction of the magnetic member and at the same time, even if the heating plate is thermally expanded, the heating plate may remain level.