The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2025
Filed:
May. 10, 2019
University of Virginia Patent Foundation, Charlottesville, VA (US);
Robert M. Weikle, Ii, Crozet, VA (US);
Linli Xie, Charlottesville, VA (US);
Michael E. Cyberey, Charlottesville, VA (US);
Souheil Nadri, Charlottesville, VA (US);
Matthew F. Bauwens, Chesapeake, VA (US);
Arthur Weston Lichtenberger, Charlottesville, VA (US);
Nicolas Scott Barker, Charlottesville, VA (US);
University of Virginia Patent Foundation, Charlottesville, VA (US);
Abstract
A probe chip device and a method for fabricating a probe chip device with an integrated diode sensor are disclosed. In one example, a probe chip device includes a beam head element that includes at least one probe tip that is configured to electrically probe a device under test. The probe chip device further includes a diode sensor that is heterogeneously integrated on the beam head element and is proximally positioned to the at least one probe tip.