The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2025
Filed:
Jun. 28, 2022
Universidade DE Aveiro, Aveiro, PT;
Alexander Tselev, Aveiro, PT;
Nikolai Vyshatko, Aveiro, PT;
Luis Manuel Santos Da Rocha Cupido, Aveiro, PT;
UNIVERSIDADE DE AVEIRO, Aveiro, PT;
Abstract
The invention describes a scanning probe imaging system with the probe held at a small distance from a sample () surface of the part during raster-scanning image acquisition. The interaction between the sample () and the probe's cantilever arm (') is achieved due to microwave near fields formed at the sharp probe tip (). Due to the near fields, the electrical impedance of the probe depends on the distance between the probe and the sample () and on the sample electrical properties, both in the immediate vicinity of the probe tip (). The microwave detection system senses the electrical impedance of the probe at a set microwave frequency. The probe-sample distance is set and controlled with the use of an optical chromatic confocal displacement sensor as well as with the signals of the microwave detection system.