The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2025
Filed:
Apr. 17, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Bernhard G. Mueller, Finsing, DE;
Peter Nunan, Monte Sereno, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method for inspecting a sample with a multi-electron beam inspection system () is described. The method includes: placing the sample on a movable stage () extending in an X-Y-plane; generating a plurality of electron beams () propagating toward the sample; focusing the plurality of electron beams on the sample at a plurality of probe positions () in a two-dimensional array; scanning the sample surface by moving the movable stage in a predetermined scanning pattern while maintaining the plurality of electron beams stationary; and detecting signal electrons emitted from the sample during the movement of the movable stage for inspecting the sample. Further, a multi-electron beam inspection system () for inspecting a sample according to the above method is described.