The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2025
Filed:
Mar. 30, 2023
Applicants:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Unist (Ulsan National Institute of Science and Technology), Ulsan, KR;
Inventors:
Taejin Choi, Suwon-si, KR;
Minsu Kim, Ulsan, KR;
Hyeonsuk Shin, Ulsan, KR;
Hyeonjin Shin, Suwon-si, KR;
Assignees:
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
UNIST(ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY), Ulsan, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 29/40 (2006.01); C30B 29/60 (2006.01); H10D 30/62 (2025.01); H10F 39/00 (2025.01);
U.S. Cl.
CPC ...
C30B 29/40 (2013.01); C30B 29/605 (2013.01); H10D 30/6211 (2025.01); H10F 39/805 (2025.01);
Abstract
Disclosed is a nanocrystalline boron nitride film having a relatively low dielectric constant and excellent mechanical properties. The nanocrystalline boron nitride film includes a crystalline boron nitride compound, and has a dielectric constant within a range of 2.5 to 5.5 at a 100 kHz operating frequency.