The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2025
Filed:
Dec. 07, 2020
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Eric Russell Madsen, Sherwood, OR (US);
Seyedalireza Torbatisarraf, San Jose, CA (US);
Yu Jiang, San Jose, CA (US);
Narudha Tai Benyuhmin, Santa Clara, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/44 (2006.01); B22F 10/28 (2021.01); B22F 10/64 (2021.01); B33Y 10/00 (2015.01); B33Y 40/20 (2020.01); B33Y 80/00 (2015.01); C23C 16/448 (2006.01);
U.S. Cl.
CPC ...
C23C 16/448 (2013.01); B22F 10/28 (2021.01); B22F 10/64 (2021.01); B33Y 10/00 (2014.12); B33Y 40/20 (2020.01); B33Y 80/00 (2014.12); B22F 2301/15 (2013.01);
Abstract
In some examples, a liquid precursor vaporizer comprises an inlet, an outlet, and a first vaporizer core, the first vaporizer core including a plurality of nested cells defining a plurality of tortuous paths through which a liquid precursor can pass in a path between the inlet and the outlet of the liquid precursor vaporizer.