The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2025
Filed:
Mar. 23, 2021
Nisshinbo Micro Devices Inc., Tokyo, JP;
Takao Fukutome, Fujimino, JP;
Yoshimitsu Karasawa, Fujimino, JP;
NISSHINBO MICRO DEVICES INC., Tokyo, JP;
Abstract
A MEMS element comprises a substratewith an opening, a vibrating membraneformed on the substratethrough an insulating film, and a backplatefixed to a spaceron the substrate. The vibrating membranehas intermittent slitsalong its edge. The backplatehas acoustic holesin the center, and etching holesin the periphery thereof and closer to the edge side than the outermost peripheral end of the slits of the vibrating membranein planar view. The edgeof the vibrating membraneand portion of the insulating filmunder the vibrating membraneare spaced apart from the bottom end of the spacer. The insulating film is etched from the edgeof the vibrating membraneand the slitsto under the vibrating membrane