The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2025
Filed:
May. 12, 2023
Infineon Technologies Ag, Neubiberg, DE;
Christian Bretthauer, Munich, DE;
Andreas Bogner, Munich, DE;
Gabriele Bosetti, Munich, DE;
NiccolĂł De Milleri, Villach, AT;
Infineon Technologies AG, Neubiberg, DE;
Abstract
A MEMS device and a method for operating a MEMS device are provided. The MEMS device comprises a piezoelectric transducer element having at least a first piezoelectric transducer region and a deflectable structure, wherein the deflectable structure comprises the piezoelectric transducer element. The MEMS device further comprises a control circuitry configured to readout at least a first sensor signal from the first region of the piezoelectric transducer element based on a deflection of the deflectable structure. The control circuitry is further configured to determine a control signal from the readout first sensor signal, wherein the control signal has a counteracting effect to the deflection of the deflectable structure when provided to the piezoelectric transducer element. The control circuitry is configured to provide the control signal to the piezoelectric transducer element for counteracting the deflection of the deflectable structure.