The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2025
Filed:
Jan. 30, 2023
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventor:
James D. Strassner, Austin, TX (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); B32B 3/26 (2006.01); B32B 7/12 (2006.01); B32B 9/04 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68785 (2013.01); B32B 3/266 (2013.01); B32B 7/12 (2013.01); B32B 9/04 (2013.01); B32B 2307/732 (2013.01);
Abstract
A substrate carrier and methods of assembling the substrate carrier are described herein. The substrate carrier includes a plurality of vacuum transfer channels to vacuum chuck a bottom of a substrate. The plurality of vacuum transfer channels reduce the radial position of the vacuum to enable vacuum chucking of the substrate from a radially outward vacuum position to an inward vacuum position. The substrate is positioned in a pocket on the substrate carrier. The substrate carrier is a glass material.