The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2025
Filed:
Dec. 15, 2022
Applicant:
Carnegie Mellon University, Pittsburgh, PA (US);
Inventors:
Maarten De Boer, Pittsburgh, PA (US);
Longchang Ni, Pittsburgh, PA (US);
Assignee:
Carnegie Mellon University, Pittsburgh, PA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/20 (2006.01); B81B 7/00 (2006.01);
U.S. Cl.
CPC ...
H01J 37/20 (2013.01); B81B 7/0003 (2013.01); H01J 2237/20221 (2013.01); H01J 2237/20264 (2013.01); H01J 2237/20271 (2013.01); H01J 2237/3151 (2013.01);
Abstract
A micro-electromechanical system (MEMS) device includes a silicon substrate; and a Tantalum (Ta) layer comprising a first portion and a second portion, a first portion being suspended over the silicon substrate and configured to move relative to the silicon substrate, and the second portion of the structure being coupled to the silicon substrate and fixed in place relative to the silicon substrate.