The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2025
Filed:
Oct. 11, 2022
Applicant:
Hitachi High-tech Corporation, Tokyo, JP;
Inventors:
Akira Nishioka, Tokyo, JP;
Motohiro Takahashi, Tokyo, JP;
Masaki Mizuochi, Tokyo, JP;
Yasuhiro Ando, Tokyo, JP;
Raifu Yamamoto, Tokyo, JP;
Assignee:
HITACHI HIGH-TECH CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/20 (2006.01); H01J 37/26 (2006.01); H01J 37/30 (2006.01);
U.S. Cl.
CPC ...
H01J 37/20 (2013.01); H01J 37/26 (2013.01); H01J 37/3007 (2013.01); H01J 2237/002 (2013.01); H01J 2237/2007 (2013.01);
Abstract
A stage apparatus includes a lower stage that moves in a Y-axis direction, an upper stage that floats from the lower stage and moves at least in an X-axis direction orthogonal to the Y-axis direction, a heat exchanger that cools a Y table of the lower stage with a refrigerant, and a control device that controls an inclination of the lower stage with reference to the Y table cooled by the heat exchanger.