The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2025
Filed:
Apr. 23, 2020
Applicant:
Hitachi High-tech Corporation, Tokyo, JP;
Inventors:
Assignee:
Hitachi High-Tech Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/07 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/07 (2013.01); H01J 37/28 (2013.01); H01J 2237/061 (2013.01); H01J 2237/06375 (2013.01);
Abstract
An electron guncapable of suppressing an uneven temperature distribution at an extraction electrode and a length-measuring SEMare provided. The electron gunis equipped with: a charged particle source; an extraction electrodefor extracting charged particles from the charged particle sourceand allowing some of the charged particles to pass while blocking some other charged particles; and an auxiliary structuredisposed in contact with the extraction electrode. The length-measuring SEMis equipped with the electron gunand a computer systemfor controlling the electron gun