Process estimation method and process estimation device

Abstract

A computer-performed process estimation method and a process estimation method using the computer are provided for estimating, based on a first process data including a process information of a predetermined target step performed in a first manufacturing device that manufactures a material through at least one step including the target step, a second process data including a process information of the target step performed in a second manufacturing device that is a different device from the first manufacturing device and manufactures the material through at least one step including the target step. This method includes machine-learning a relationship between the first process data and a first structure data obtained from a sample after the target step in the first manufacturing device, and creating a first regression model representing a correlation between the first process data and the first structure data, machine-learning a relationship between the second process data and a second structure data obtained from a sample after the target step in the second manufacturing device, and creating a second regression model representing a correlation between the second process data and the second structure data, creating a third regression model representing a correlation between the first process data and the second process data based on the first regression model and the second regression model, and by using the third regression model, estimating an estimated second process data that includes the second process data corresponding to an estimation source-first process data including the first process data that is an arbitrary estimation source.