The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2025
Filed:
Jul. 19, 2022
Koninklijke Philips N.v., Eindhoven, NL;
Didier Mathijs Maria Justina Petit, Aachen, DE;
Marcus Antonius Verschuuren, Eindhoven, NL;
Johannes Balthasar Maria Soetens, Eindhoven, NL;
Wilhelmus Johannes Everardus Evers, Eindhoven, NL;
Maurice Leonardus Johannes Janssen, Aachen, DE;
Koninklijke Philips N.V., Eindhoven, NL;
Abstract
An imprinting apparatus comprises a first carrier for carrying a flexible stamp and a second carrier movable relative to the first carrier and configured to carry a substrate having a resist layer. The second carrier comprises a chuck and a set of chuck actuators for translating a portion of the chuck in a Z-axis direction. Each chuck actuator comprises an actuator output and a lever arrangement between the actuator output and a chuck drive member. The lever arrangement enables an increase in positioning accuracy and increased stiffness, compared to the direct control of position using the actuator output.