The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 11, 2025

Filed:

Jan. 11, 2024
Applicant:

Optipro Systems, Llc, Ontario, NY (US);

Inventors:

James F. Munro, Ontario, NY (US);

Robert D. Niederriter, Albany, CA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/02015 (2022.01); G01B 9/02 (2022.01); G01B 9/02002 (2022.01); G01B 9/02061 (2022.01); G01B 11/02 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02015 (2013.01); G01B 9/02002 (2013.01); G01B 9/02034 (2013.01); G01B 9/02061 (2013.01); G01B 11/02 (2013.01);
Abstract

An interferometer system for measuring the displacement of a location of a test surface includes a reflective beamsplitter having a through-hole through which light enters into and exits from a reference arm and having a second through-hole through which a portion of light from the measurement arm of the interferometer passes through the beamsplitter and is incident on a position sensing device (PSD). The output of the PSD is then used as an indicator of the amount and direction of tilt of the surface under test so that systemic errors of the interferometer induced by the tilt of the test surface can be determined and removed from the displacement measurement.


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