The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2025
Filed:
Feb. 25, 2022
Applicant:
Edwards Japan Limited, Chiba, JP;
Inventor:
Takashi Kabasawa, Chiba, JP;
Assignee:
Edwards Japan Limited, Chiba, JP;
Primary Examiner:
Int. Cl.
CPC ...
F04D 19/04 (2006.01); F04D 29/58 (2006.01); F04D 29/70 (2006.01);
U.S. Cl.
CPC ...
F04D 19/042 (2013.01); F04D 29/5853 (2013.01); F04D 29/701 (2013.01);
Abstract
A vacuum pump includes a heater, purge gas introduction ports, a purge gas valve, and an exhaust valve. In a cleaning operation mode, at least one of the heater, the purge gas valve, and the exhaust valve is controlled, and a pressure in at least a part of an interior of the turbomolecular pump is increased to a pressure region with which a temperature is greater than or equal to a sublimation temperature of the deposits in the turbomolecular pump and that causes an intermediate flow or a viscous flow.