The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2025
Filed:
Feb. 11, 2022
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventor:
Sungbae Kim, Yongin-si, KR;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/52 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); F16K 27/00 (2006.01); F16K 31/126 (2006.01); F16K 37/00 (2006.01); F17D 1/04 (2006.01); F17D 3/01 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
C23C 16/52 (2013.01); C23C 16/4412 (2013.01); C23C 16/455 (2013.01); C23C 16/45544 (2013.01); C23C 16/45561 (2013.01); F16K 27/003 (2013.01); F16K 31/126 (2013.01); F16K 37/0058 (2013.01); F17D 1/04 (2013.01); F17D 3/01 (2013.01); H01L 21/67017 (2013.01); H01L 21/67253 (2013.01);
Abstract
A substrate processing device capable of detecting a gas leakage includes at least one reactor; a gas supply unit configured to supply a gas to the reactor; and a detection unit connected to the gas supply unit, wherein the detection unit is configured to detect a gas flow in the gas supply unit.