The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 11, 2025

Filed:

Aug. 05, 2020
Applicant:

Draka Comteq B.v., Delft, NL;

Inventors:

Mattheus Jacobus Nicolaas Van Stralen, Delft, NL;

Igor Milicevic, Delft, NL;

Gertjan Krabshuis, Delft, NL;

Ton Breuls, Delft, NL;

Assignee:

Draka Comteq B.V., Delft, NL;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/511 (2006.01); C03B 37/014 (2006.01); C23C 16/54 (2006.01);
U.S. Cl.
CPC ...
C23C 16/511 (2013.01); C03B 37/014 (2013.01); C23C 16/545 (2013.01);
Abstract

The invention relates to a method and an apparatus for performing a plasma chemical vapour deposition process. The apparatus comprises a mainly cylindrical resonator being provided with an outer cylindrical wall and an inner coaxial cylindrical wall defining therebetween a resonant cavity that is operable at an operating frequency. The resonant cavity extends in a circumferential direction around a cylindrical axis of the inner and outer cylindrical wall. Further, the outer cylindrical wall includes an input port connectable to an input waveguide. In addition, the inner cylindrical wall includes slit sections extending in a circumferential direction around the cylindrical axis. A greatest dimension defining the aperture of the slit sections is smaller than half the wavelength of the operating frequency.


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