The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2025
Filed:
Jan. 14, 2021
Asm Ip Holding B.v., Almere, NL;
Dinkar Nandwana, Tempe, AZ (US);
Carl Louis White, Gilbert, AZ (US);
Eric James Shero, Phoenix, AZ (US);
William George Petro, Scottsdale, AZ (US);
Herbert Terhorst, Amersfoort, NL;
Gnyanesh Trivedi, Tempe, AZ (US);
Mark Olstad, Chandler, AZ (US);
Ankit Kimtee, Phoenix, AZ (US);
Kyle Fondurulia, Phoenix, AZ (US);
Michael Schmotzer, Chandler, AZ (US);
Jereld Lee Winkler, Gilbert, AZ (US);
ASM IP Holding B.V., Versterkerstraat, NL;
Abstract
The present disclosure pertains to embodiments of a showerhead assembly which can be used to deposit semiconductor layers using processes such as atomic layer deposition (ALD). The showerhead assembly has a showerhead which has an increased thickness which advantageously decreases reactor chamber size and decreases cycling time. Decreased cycling time can improve throughput and decrease costs.