The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2025
Filed:
Sep. 27, 2023
Chuyun Tek (Shanghai) Co., Ltd., Shanghai, CN;
Chuyun Tek (Shanghai) Co., Ltd., Shanghai, CN;
Abstract
A gas delivery assembly and gas-phase reaction apparatus; the gas delivery assembly includes an internal gas delivery assembly in a central region of the gas delivery assembly and a peripheral gas delivery assembly surrounding the central region. The peripheral gas delivery assembly includes tubular channels and annular grooves communicating with the tubular channels to allow gas outflow from the tubular channels; for some tubular channels, there exists a non-zero angle φ between the main axis and a projection of its tube axis on the tangent plane with respect to the main axis, so that the gas outflow from the peripheral gas delivery assembly constitutes a rotary gas flow, and the rotation direction of the rotary gas flow is the same as that of the susceptor during reaction, thereby suppressing or eliminating vortices.