The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2025
Filed:
Jul. 19, 2024
Applicant:
Viavi Solutions Suzhou Co., Ltd., Suzhou, CN;
Inventors:
Ailing Ding, Shanghai, CN;
Weibin Huang, Kunshan, CN;
Yinxiang Xia, Suzhou, CN;
Markus K. Tilsch, Santa Rosa, CA (US);
Assignee:
VIAVI SOLUTIONS SUZHOU CO., LTD., Suzhou, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/50 (2006.01); C23C 14/34 (2006.01); H01J 37/32 (2006.01); H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
C23C 14/50 (2013.01); C23C 14/34 (2013.01); H01J 37/32715 (2013.01); H01J 37/3438 (2013.01);
Abstract
In some implementations, a wafer holder apparatus includes a jig structure to receive a wafer, wherein the jig structure includes a first angled surface with respect to a nominal coating plane; and a spring structure to compress an end of the wafer against the first angled surface, wherein the spring structure includes: a spring; and a compression surface attached to the spring, wherein the compression surface includes a second angled surface matched to the first angled surface.