The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2025
Filed:
Nov. 22, 2022
Applicant:
Rohm Co., Ltd., Kyoto, JP;
Inventor:
Takashi Naiki, Kyoto, JP;
Assignee:
ROHM CO., LTD., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); B81B 7/02 (2006.01);
U.S. Cl.
CPC ...
B81B 7/02 (2013.01); G02B 26/0858 (2013.01); B81B 2201/042 (2013.01); B81B 2203/0109 (2013.01); B81B 2203/04 (2013.01); B81B 2207/053 (2013.01);
Abstract
Disclosed is a MEMS mirror including a flat plate that is displaceable in a film thickness direction, a frame part that is separated from the flat plate and surrounds the flat plate, a support part that connects the flat plate and the frame part and is smaller in film thickness than the frame part, and a piezoelectric body for control that is arranged on the support part. A control voltage is applied to the piezoelectric body for control to deform the piezoelectric body for control and deform the support part together with the deformation of the piezoelectric body for control, to thereby adjust a spring constant of the support part.