The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 04, 2025

Filed:

Jun. 16, 2022
Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo, JP;

Inventors:

Viktor Plesski, Gorgier, CH;

Soumya Yandrapalli, Lausanne, CH;

Sean Mchugh, Santa Barbara, CA (US);

Gregory L. Hey-Shipton, Santa Barbara, CA (US);

Garrett Williams, San Mateo, CA (US);

Ventsislav Yantchev, Sofia, BG;

Andrew Guyette, San Mateo, CA (US);

Neal Fenzi, Santa Barbara, CA (US);

Jesson John, Dublin, CA (US);

Bryant Garcia, Mississauga, CA;

Robert B. Hammond, Santa Barbara, CA (US);

Patrick Turner, San Bruno, CA (US);

Douglas Jachowski, Santa Cruz, CA (US);

Greg Dyer, Santa Barbara, CA (US);

Chris O′Brien, San Diego, CA (US);

Andrew Kay, Provo, UT (US);

Albert Cardona, Santa Barbara, CA (US);

Dylan Kelly, San Diego, CA (US);

Wei Yang, Goleta, CA (US);

Marie Chantal Mukandatimana, Santa Barbara, CA (US);

Luke Myers, Santa Barbara, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/56 (2006.01); H03H 3/02 (2006.01); H03H 9/02 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01); H10N 30/87 (2023.01);
U.S. Cl.
CPC ...
H03H 9/568 (2013.01); H03H 9/02015 (2013.01); H03H 9/02031 (2013.01); H03H 9/02062 (2013.01); H03H 9/02228 (2013.01); H03H 9/132 (2013.01); H03H 9/174 (2013.01); H03H 9/176 (2013.01); H03H 9/562 (2013.01); H03H 9/564 (2013.01); H03H 3/02 (2013.01); H03H 2003/023 (2013.01); H03H 9/02039 (2013.01); H10N 30/877 (2023.02);
Abstract

Filter devices are disclosed. A filter device includes a piezoelectric plate comprising a supported portion, a first diaphragm, and a second diaphragm. The supported portion is attached to a substrate and the first and second diaphragms spans respective cavities in the substrate. A first interdigital transducer (IDT) has interleaved fingers on the first diaphragm. A second interdigital transducer (IDT) has interleaved fingers on the second diaphragm. A first dielectric layer is between the interleaved fingers of the first IDT, and a second dielectric layer is between the interleaved fingers of the second IDT. A thickness of the first dielectric layer is greater than a thickness of the second dielectric layer. The piezoelectric plate and the first and second IDTs are configured such that radio frequency signals applied to first and second IDTs excite primary shear acoustic modes in the respective diaphragms.


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