The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 04, 2025

Filed:

Jun. 01, 2023
Applicant:

Nanya Technology Corporation, New Taipei, TW;

Inventor:

Chih-Hsuan Yeh, Taoyuan, TW;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/544 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
H01L 23/544 (2013.01); G03F 7/70633 (2013.01); H01L 2223/54426 (2013.01);
Abstract

A semiconductor device and method for manufacturing the same are provided. The semiconductor device includes a substrate, a first pattern and a second pattern. The first pattern is disposed on the substrate. The first pattern includes a first segment and a second segment, each of which extends along a first direction. The second pattern is disposed on the first pattern. The second pattern includes a first part extending along a second direction different from the first direction. The first part of the second pattern overlaps the first segment and the second segment along a third direction different from the first direction and the second direction. The first pattern and the second pattern are associated with an overlay error.


Find Patent Forward Citations

Yeh, Chih-Hsuan. (2025). Semiconductor device including mark structure for measuring overlay error and method for manufacturing the same (U.S. Patent No. 12463145). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12463145

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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