The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2025
Filed:
May. 28, 2021
Zhongke Jingyuan Electron Limited, Beijing (Cn), Beijing, CN;
Lei Jiang, Beijing, CN;
ZHONGKE JINGYUAN ELECTRON LIMITED, BEIJING (CN), Beijing, CN;
Abstract
Provided is a wafer locking mechanism configured to lock a wafer, the wafer locking mechanism comprising: a wafer base, constructed in a form of a frustum shape tapering from a bottom portion thereof towards a top portion thereof, and configured to be elevatable along a direction of an axis thereof; a plurality of rods, which are diametrically aligned in pairs perpendicular to the axis; and a plurality of compression springs, which are respectively sheathed on respective distal ends of the plurality of rods distal to the wafer base, in one-to-one correspondence and extend radially outwards. Each of the rods is provided with a ball-head portion which is located at a proximal end thereof proximate to the wafer base and abuts against the wafer base, and a jaw which is pressed radially inwards by the corresponding compression spring.