The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 04, 2025

Filed:

Jul. 10, 2020
Applicant:

Kawasaki Jukogyo Kabushiki Kaisha, Kobe, JP;

Inventors:

Ippei Shimizu, Kobe, JP;

Yoshiki Maeda, Kobe, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); B25J 15/00 (2006.01); F16B 5/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68707 (2013.01); B25J 15/0014 (2013.01); F16B 5/0233 (2013.01);
Abstract

A robot hand to hold a substrate, which includes a base body, a blade defining a holding position for holding the substrate and attached at a base part to the base body, and a differential screw having a center axis perpendicular to a principal surface of the substrate existing at the holding position and configured to attach the base part of the blade to the base body. The differential screw includes a first threaded part having a first pitch, a second threaded part having a second pitch different from the first pitch, and an intervening member coaxially having a third threaded part to be threadedly engaged with the first threaded part, and a fourth threaded part to be threadedly engaged with the second threaded part. The first threaded part is provided to the base body, and the second threaded part is provided to the base part of the blade.


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