The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2025
Filed:
Dec. 24, 2020
Hitachi High-tech Corporation, Tokyo, JP;
Hitachi High-Tech Corporation, Tokyo, JP;
Abstract
A charged particle microscope includes an electron gun provided inside a barrel and a stage. In the stage, a sample holderholding a sample SAM can be installed. The stageincludes an annular rough movement stage memberand an annular fine movement stage member. An X rough movement actuatorand a Y rough movement actuatorare connected to the rough movement stage member. An X fine movement actuatorand a Y fine movement actuatorare connected to the fine movement stage member. Here, a first movable range in which the X rough movement actuatorand the Y rough movement actuatorare able to move the rough movement stage memberis broader than a second movable range in which the X fine movement actuatorand the Y fine movement actuatorare able to move the fine movement stage member. Accordingly, it is possible to improve performance of the charged particle microscope.