The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2025
Filed:
Jun. 29, 2021
Applicant:
Hitachi High-tech Corporation, Tokyo, JP;
Inventors:
Naoki Samura, Tokyo, JP;
Yasuhiko Nara, Tokyo, JP;
Assignee:
Hitachi High-Tech Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 1/067 (2006.01); G01R 1/04 (2006.01); G06T 7/73 (2017.01);
U.S. Cl.
CPC ...
G01R 1/06794 (2013.01); G01R 1/0408 (2013.01); G06T 7/74 (2017.01); G06T 2207/10061 (2013.01); G06T 2207/30148 (2013.01); G06T 2207/30204 (2013.01);
Abstract
A probe device includes a sample stagethat supports a sample, a probe unitto which a probebrought into contact with a predetermined sample surface of the sample is attached, a first cameraA that images the sample and the probe, and a first camera optical axis adjustment stageA that adjusts an optical axis of the first camera, in which the optical axis of the first camera is parallel to the sample surface, and the first camera optical axis adjustment stage allows the optical axis of the first camera to be moved in a direction perpendicular to the sample surface.