The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2025
Filed:
Jan. 26, 2023
Applicant:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Inventor:
Yumi Hayashi, Ayase Kanagawa, JP;
Assignee:
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/22 (2006.01); G01N 33/00 (2006.01);
U.S. Cl.
CPC ...
G01N 27/22 (2013.01); G01N 33/0027 (2013.01);
Abstract
According to one embodiment, a sensor includes a structure. The structure includes a first layer, a first film including a first film region, and a first intermediate layer including a first partial region. The first partial region is between the first layer and the first film region. A volume of the first layer is changeable depending on a detection target around the structure. The first film includes silicon and oxygen. The first intermediate layer includes at least one selected from the group consisting of Pd, Pt and Ti.