The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2025
Filed:
Nov. 21, 2023
Chongqing Huapu Information Technology Co., Ltd., Chongqing, CN;
Chongqing Huapu Intelligent Equipment Co., Ltd., Chongqing, CN;
Chongqing Huapu Quantum Technology Co., Ltd., Chongqing, CN;
Chongqing Huapu Scientific Instrument Co., Ltd., Chongqing, CN;
Yunnan Huapu Quantum Material Co., Ltd, Yunnan, CN;
Roi Optoelectronics Technology Co, Ltd., Shanghai, CN;
Guangdong Roi Optoelectronics Technology Co., Ltd., Guangdong, CN;
Chongqing Institute of East China Normal University, Chongqing, CN;
East China Normal University, Shanghai, CN;
CHONGQING HUAPU INFORMATION TECHNOLOGY CO., LTD., Chongqing, CN;
CHONGQING HUAPU INTELLIGENT EQUIPMENT CO., LTD., Chongqing, CN;
CHONGQING HUAPU QUANTUM TECHNOLOGY CO., LTD., Chongqing, CN;
CHONGQING HUAPU SCIENTIFIC INSTRUMENT CO., LTD., Chongqing, CN;
YUNNAN HUAPU QUANTUM MATERIAL CO., LTD, Kunming, CN;
ROI OPTOELECTRONICS TECHNOLOGY CO, LTD., Shanghai, CN;
GUANGDONG ROI OPTOELECTRONICS TECHNOLOGY CO., LTD., Guangdong, CN;
CHONGQING INSTITUTE OF EAST CHINA NORMAL UNIVERSITY, Chongqing, CN;
EAST CHINA NORMAL UNIVERSITY, Shanghai, CN;
Abstract
The present disclosure provides a method of an ultrafast-pulsed laser deposition and a device thereof, wherein a single emitted femtosecond pulse is split, and the split pulses are synchronized in the time domain, and then coupled with each other to form a plasma grating or lattice to excite the target material once; then multiple pulsed lasers are sequentially coupled multiple times with the plasma gratings or lattices to excite the target material multiple times, and the excited target material is deposited and reacted on the substrate to form a thin film.