The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2025
Filed:
Jan. 07, 2025
Nuvoton Technology Corporation Japan, Kyoto, JP;
Yusuke Kanda, Toyama, JP;
NUVOTON TECHNOLOGY CORPORATION JAPAN, Kyoto, JP;
Abstract
A semiconductor device includes: a Si substrate; a back electrode provided below the Si substrate; a SiC layer provided above the Si substrate; a nitride semiconductor layer provided above the SiC layer; a source electrode and a drain electrode provided above the nitride semiconductor layer; a gate electrode in contact with the nitride semiconductor layer; an intermediate layer provided in an opening that creates an opening in the SiC layer and the nitride semiconductor layer; a metal layer provided above the opening so as to cover the intermediate layer; and a conductor that is provided inside a through via that penetrates the intermediate layer and the Si substrate and is electrically connected with the back electrode and the metal layer. The intermediate layer is a metal nitride layer or a silicon oxide layer.