The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 28, 2025

Filed:

Oct. 22, 2024
Applicant:

Nuvoton Technology Corporation Japan, Kyoto, JP;

Inventors:

Takashi Ohashi, Osaka, JP;

Takeshi Imamura, Kyoto, JP;

Hiroto Katsuda, Kyoto, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 25/07 (2006.01); H01L 23/00 (2006.01); H10D 30/66 (2025.01); H10D 62/10 (2025.01); H10D 64/23 (2025.01);
U.S. Cl.
CPC ...
H01L 25/072 (2013.01); H01L 24/29 (2013.01); H01L 24/32 (2013.01); H10D 30/668 (2025.01); H10D 62/117 (2025.01); H10D 62/126 (2025.01); H10D 64/252 (2025.01); H01L 2224/2919 (2013.01); H01L 2224/32058 (2013.01); H01L 2224/32137 (2013.01); H01L 2224/32225 (2013.01); H01L 2924/13091 (2013.01); H01L 2924/3511 (2013.01);
Abstract

A semiconductor device includes: a semiconductor layer; first and second vertical MOS transistors provided in the semiconductor layer; a metal layer connected to and in contact with an entire surface on a back face side of the semiconductor layer; and a support bonded to a back face side of the metal layer via an adhesive. In a plan view, the support is larger in area than the semiconductor layer and encompasses the semiconductor layer. A thickness of the support is greater than a thickness of the semiconductor layer. In a cross-sectional view, a height of the adhesive along a lateral face of the semiconductor layer does not reach a top face of the semiconductor layer. In the cross-sectional view, a semiconductor chip resulting from excluding the support and the adhesive from the semiconductor device is in a curved shape that projects in a direction toward the support.


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