The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 28, 2025

Filed:

Apr. 06, 2023
Applicant:

Semes Co., Ltd., Cheonan-si, KR;

Inventor:

Youngjun Son, Cheonan-si, KR;

Assignee:

Semes Co., Ltd., Chungcheongnam-do, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68742 (2013.01); H01L 21/67103 (2013.01); H01L 21/67288 (2013.01); H01L 21/6875 (2013.01); H01L 21/68757 (2013.01);
Abstract

A substrate treating apparatus includes a support plate having a first decompression hole and a second decompression hole in a first surface facing a substrate and including a first decompression flow path connected to the first decompression hole and a second decompression flow path connected to the second decompression hole, a plurality of movable pins protruding from the first surface of the support plate and configured to contact a conductive line according to movement in a first direction, and a controller configured to adjust an order of decompressing the first decompression flow path and the second decompression flow path.


Find Patent Forward Citations

Son, Youngjun. (2025). Substrate treating apparatus and substrate treating method (U.S. Patent No. 12456643). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12456643

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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