The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2025
Filed:
Jul. 20, 2020
Hitachi High-tech Corporation, Tokyo, JP;
Kazuhiro Honda, Tokyo, JP;
Hiroyuki Ito, Tokyo, JP;
Takashi Doi, Tokyo, JP;
Soichiro Matsunaga, Tokyo, JP;
Hitachi High-Tech Corporation, Tokyo, JP;
Abstract
A decelerating electrode of an energy filter includes an electrode pair that has an opening and a cavity portion provided in a rotationally symmetrical manner with the center of the opening as the optical axis. Voltages with electric potentials that are substantially the same as that of a charged particle beam are independently applied to both sides of the decelerating electrode. When an electrical field protrudes into the cavity portion, a saddle point having the same electric potential as that of incident charged particles is formed inside the decelerating electrode. The saddle point acts as a high pass filter for incident charged particles at an energy resolution ofmV or less. By analyzing charged particles which have been energy-separated, it is possible to measure the energy spectrum and ΔE at the high resolution ofmV or less and to obtain an SEM/STEM image with a high resolution.