The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 28, 2025

Filed:

Feb. 06, 2023
Applicant:

University of Central Florida Research Foundation, Inc., Orlando, FL (US);

Inventors:

Xiaoming Yu, Orlando, FL (US);

Boyang Zhou, Orlando, FL (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70025 (2013.01);
Abstract

A laser patterning method may include fabricating one or more precursor sites on a sample, generating an illumination beam including one or more pulse bursts, each pulse burst including two or more laser pulses, and scanning the illumination beam across the sample along a scan pattern including locations of the one or more precursor sites. At least one of intensities, temporal inter-pulse spacings, or spatial overlap between the two or more laser pulses in the illumination beam may be selected to selectively excite the one or more precursor sites to selectively modify the sample at the one or more precursor sites to form one or more patterned features, where a dimension of at least one feature in the one or more patterned features along at least one dimension is smaller than a size of the illumination beam on the sample.


Find Patent Forward Citations

Loading…