The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2025
Filed:
Jan. 17, 2020
Shenzhen Hypernano Optics Technology Co., Ltd, Shenzhen, CN;
Bin Guo, Shenzhen, CN;
SHENZHEN HYPERNANO OPTICS TECHNOLOGY CO., LTD., Shenzhen, CN;
Abstract
A tunable infrared optical filter device, includes a first mirror and a second mirror bonded to each other to form a cavity therebetween. A surface of a position where the first mirror and the second mirror are bonded to each other is provided with an electrode for driving the first mirror or the second mirror to move, and each of the first mirror and the second mirror is a distributed Bragg reflector formed by bonding silicon films. The silicon film may be formed by machining the silicon film wafer, to form the distributed Bragg reflector composed of the two silicon films and the chambers therebetween. The distributed Bragg reflector may also be formed by bonding the silicon film and the silicon film of an SOI wafer.