The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2025
Filed:
Jun. 15, 2018
Applicant:
Picosun Oy, Espoo, FI;
Inventor:
Sven Lindfors, Espoo, FI;
Assignee:
Picosun Oy, Espoo, FI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 35/00 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01); C30B 25/16 (2006.01); C30B 29/20 (2006.01);
U.S. Cl.
CPC ...
C23C 16/403 (2013.01); C23C 16/45504 (2013.01); C23C 16/45546 (2013.01); C30B 25/165 (2013.01); C30B 29/20 (2013.01);
Abstract
The invention relates to methods and apparatus in which precursor vapor is guided along at least one in-feed line into a reaction chamber of a deposition reactor, and material is deposited on surfaces of a batch of vertically placed substrates by establishing a vertical flow of precursor vapor in the reaction chamber and having it enter in a vertical direction in between said vertically placed substrates.