The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2025
Filed:
Jun. 04, 2020
Applicant:
National Institute of Advanced Industrial Science and Technology, Tokyo, JP;
Inventors:
Sri Ayu Anggraini, Tosu, JP;
Morito Akiyama, Tosu, JP;
Masato Uehara, Tosu, JP;
Hiroshi Yamada, Tosu, JP;
Kenji Hirata, Tosu, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C04B 35/581 (2006.01); H10N 30/00 (2023.01); H10N 30/20 (2023.01); H10N 30/30 (2023.01);
U.S. Cl.
CPC ...
C04B 35/581 (2013.01); H10N 30/20 (2023.02); H10N 30/708 (2024.05); C04B 2235/40 (2013.01); H10N 30/30 (2023.02);
Abstract
Provide are a nitride piezoelectric body having a value indicating a performance index (at least any one of d, g, and K) higher than that of aluminum nitride not doped with any element, and a MEMS device using the same. The nitride piezoelectric body is a piezoelectric body represented by chemical formula AlMgTaN, wherein X+Y is less than 1, X is in a range of more than 0 and less than 1, and Y is in a range of more than 0 and less than 1, and Ta includes tetravalent tantalum.