The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 21, 2025

Filed:

Dec. 05, 2017
Applicant:

The Australian National University, Acton, AU;

Inventors:

Di Yan, Bruce, AU;

Andres Cuevas, Griffith, AU;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H10F 10/166 (2025.01); C23C 14/14 (2006.01); C23C 14/58 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H10F 10/166 (2025.01); C23C 14/14 (2013.01); C23C 14/5806 (2013.01); H01L 21/02381 (2013.01); H01L 21/02532 (2013.01);
Abstract

The invention relates to a process for fabricating a solar cell. The process comprises depositing a layer of amorphous silicon on a substrate using physical vapour deposition, said substrate being a layer of a dielectric disposed on a silicon wafer. The amorphous silicon is then annealed so as to generate a layer of polycrystalline silicon on the substrate.


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