The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2025
Filed:
Nov. 17, 2021
Applicant:
Ngk Insulators, Ltd., Nagoya, JP;
Inventors:
Tomohiro Hara, Handa, JP;
Yutaka Unno, Handa, JP;
Assignee:
NGK INSULATORS, LTD., Nagoya, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B 3/18 (2006.01); H01L 21/67 (2006.01); H05B 3/06 (2006.01); H05B 3/28 (2006.01);
U.S. Cl.
CPC ...
H05B 3/18 (2013.01); H01L 21/67103 (2013.01); H05B 3/06 (2013.01); H05B 3/283 (2013.01); H05B 2203/003 (2013.01); H05B 2203/007 (2013.01); H05B 2203/017 (2013.01);
Abstract
A ceramic heater includes a disc-shaped ceramic plate having a wafer placement surface, and a shaft provided on a surface on an opposite side of the wafer placement surface of the ceramic plate. First and second resistance heating elements are embedded inside the ceramic plate. When the ceramic plate is viewed from above, the gap (first gap) between first turn-back sections which face each other in a circumferential direction, and the gap (second gap) between second turn-back sections which face each other in a circumferential direction are arranged so as not to overlap.