The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2025
Filed:
Mar. 21, 2022
Screen Holdings Co., Ltd., Kyoto, JP;
Daiichi Kitagishi, Kyoto, JP;
Hiroshi Horiguchi, Kyoto, JP;
SCREEN Holdings Co., Ltd., , JP;
Abstract
In a substrate processing apparatus, when a hand located above a substrate holder holds a substrate jig having a lower surface provided with three photosensors that are arranged nonlinearly, a substrate rotation mechanism rotates the substrate holder to form a circular rotation trajectory of a mark provided in advance on the substrate holder. A teaching unit calculates the position of the hand relative to the substrate holder in plan view in accordance with the position of the hand relative to the rotation trajectory obtained from each of the three photosensors and generates horizontal teaching information that indicates an adequate relationship between the relative positions of the hand and the substrate holder in plan view. This simplifies processing for generating teaching information.