The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2025
Filed:
Nov. 24, 2022
Beijing Naura Microelectronics Equipment Co., Ltd., Beijing, CN;
Jinlong Li, Beijing, CN;
Jianguo Li, Beijing, CN;
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD., Beijing, CN;
Abstract
A wafer boat temporary storage device for temporarily storing a wafer boat in a semiconductor processing device includes two carrying platforms arranged oppositely and configured to carry two ends of the wafer boat in a length direction of the wafer boat, respectively. The wafer boat includes two positioning parts arranged at two ends in the length direction and spaced apart in a width direction of the wafer boat. Each carrying platform includes a first positioning structure and a second positioning structure. The first positioning structure is configured to make rolling contact with two sides of the two positioning parts at one end of the wafer boat that face toward or away from the two positioning parts at the other end of the wafer boat in the length direction to perform alignment between the wafer boat and the wafer boat temporary storage device in the length direction.