The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 21, 2025

Filed:

Dec. 27, 2023
Applicant:

Daihen Corporation, Osaka, JP;

Inventors:

Yuichi Hasegawa, Osaka, JP;

Yuya Ueno, Osaka, JP;

Assignee:

DAIHEN Corporation, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H03H 7/38 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32183 (2013.01); H01J 37/32146 (2013.01); H01J 37/32155 (2013.01); H03H 7/38 (2013.01);
Abstract

A method according to the present disclosure includes: searching for an initial phase of a modulation signal at which an absolute value of a reflection coefficient or a power value of a reflected wave power at an output terminal of a first power supply calculated in a second power supply ON period is minimized in a state where a first matching operation in a first matching unit is stopped; searching for a frequency shift at which the absolute value of the reflection coefficient or the power value at the output terminal calculated in the second power supply ON period is minimized in a state where the first matching operation is stopped; and searching for an offset frequency at which the absolute value of the reflection coefficient or the power value at the output terminal calculated in a second power supply OFF period is minimized in a state where the first matching operation is stopped.


Find Patent Forward Citations

Hasegawa, Yuichi. (2025). Method of controlling high-frequency power supply system (U.S. Patent No. 12451330). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12451330

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…