The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2025
Filed:
Sep. 27, 2022
Applicant:
Nam Hun Kim, Yeoju-si, KR;
Inventor:
Nam Hun Kim, Yeoju-si, KR;
Assignee:
[object Object];
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3211 (2013.01); H01J 2237/334 (2013.01);
Abstract
The present invention relates to a plasma source using a planar helical coil, comprising: a unit coil extending from a unit-extension terminal and extending in a circular shape to a unit-extension ending terminal in one plane, wherein a plurality of unit coils are staked and comprise a connection portion that connects the unit-extension ending terminal of one unit coil and the unit-extension terminal of another unit coil.