The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2025
Filed:
Jun. 20, 2023
Applied Materials, Inc., Santa Clara, CA (US);
Nagesha Jansale Venkatesha, Bengaluru, IN;
Yacov Elgar, Santa Clara, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Embodiments of substrate supports for aligning a substrate are provided herein. In some embodiments, a substrate support for aligning a substrate include: a base plate; a rotary assembly including a stator coupled to the base plate and a rotor rotatably coupled to the stator via a bearing disposed therebetween; a bellows assembly fixed to the rotor; and a lever having a first end coupled to the rotor and a second end configured to be coupled to an actuator; and a chuck assembly disposed atop the base plate and fixedly coupled to the bellows assembly, wherein the chuck assembly is rotationally and axially movable along a central axis with respect to the base plate, and wherein rotation of the lever about the central axis rotates the bellows assembly and the chuck assembly with respect to the base plate to align the substrate with respect to the base plate.