The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2025
Filed:
Oct. 18, 2021
Applicant:
Cisco Technology, Inc., San Jose, CA (US);
Inventors:
Eng Wen Ong, Breinigsville, PA (US);
Mark A. Webster, Bethlehem, PA (US);
Assignee:
Cisco Technology, Inc., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/18 (2006.01); H01L 21/302 (2006.01); H01S 5/0225 (2021.01); H10H 20/819 (2025.01);
U.S. Cl.
CPC ...
G02B 5/1857 (2013.01); H01L 21/302 (2013.01); H01S 5/0225 (2021.01); H10H 20/819 (2025.01); G02B 2005/1804 (2013.01);
Abstract
A grating coupler with a wafer bonded configuration includes: a substrate; an oxide layer disposed on the substrate; a silicon nitride layer disposed above the oxide layer; a first silicon layer disposed above the silicon nitride layer; a second silicon layer disposed above the first silicon layer; and a bi-layer grating disposed above the silicon nitride layer. The bi-layer grating includes (i) a first etched layer of the first silicon layer and (ii) a second etched layer of the second silicon layer.