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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12449388 B1

PDFFull Text
Date of Patent:
Oct. 21, 2025

Filed:

Jul. 10, 2020

Mems gas sensor and array thereof, and gas detection and preparation method

Applicant:

Wiinaa Co., Ltd., Anhui, CN;

Inventors:

Lei Xu, Anhui, CN;

Dongcheng Xie, Anhui, CN;

Dongliang Chen, Anhui, CN;

Assignee:

Wiinaa Co., Ltd., Anhui, CN;

Attorney:

BROOKS KUSHMAN P.C.

Primary Examiner:

Benjamin R Schmitt

Int. Cl.
CPC ...
G01N 27/12 (2006.01); B81B 7/00 (2006.01); B81B 7/02 (2006.01); B81B 7/04 (2006.01); B81C 1/00 (2006.01); G01N 33/00 (2006.01);
U.S. Cl.
CPC ...
G01N 27/128 (2013.01); B81B 7/0009 (2013.01); B81B 7/02 (2013.01); B81B 7/04 (2013.01); B81C 1/00642 (2013.01); G01N 27/125 (2013.01); G01N 33/0031 (2013.01); B81B 2201/02 (2013.01); B81B 2201/0292 (2013.01);
Abstract

A MEMS gas sensor (A) and array (B) thereof, a gas detection and preparation method. The gas sensor (A) comprises a first substrate (A) with a cavity (A) provided in a first surface, and a gas detection assembly (A) arranged at an opening of the cavity The gas detection assembly comprises: a supporting suspension bridge (A) erected on the opening of the cavity, and a gas detection part (A) arranged on the supporting suspension bridge. The gas detection part comprises a strip-shaped heating electrode part (A), an insulating layer (A), a strip-shaped detection electrode part (A) and a gas-sensitive material part (A), which are sequentially stacked. The strip-shaped detection electrode part comprises a first detection electrode part (A-) and a second detection electrode part (A-), with a first opening (A) provided between the A-and A-the gas-sensitive material part is arranged at the position of the first opening.

Find Patent Forward Citations

Xu, Lei. (2025). Mems gas sensor and array thereof, and gas detection and preparation method (U.S. Patent No. 12449388). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12449388

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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