The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2025
Filed:
Jul. 19, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Philip Mathew, Milpitas, CA (US);
Mehran Behdjat, San Jose, CA (US);
Masamori Sanaka, Yachiyo, JP;
Koji Nakanishi, Tokyo, JP;
Ryan Murdoch, Grenoble, FR;
Mark David Johnson, Orem, UT (US);
Jun Qian, Sherwood, OR (US);
Yuchun Chang, Cupertino, CA (US);
George Govel, Schenectady, NY (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Methods and apparatus for lamp housing crack detection are provided herein. For example, a method associated with a process chamber having a lamp housing comprises sequentially processing a plurality of substrates in the process chamber, during processing of the plurality of substrates, collecting lamp housing data indicative of a fluid leak in the lamp housing from a sensor operably connected to the lamp housing of the process chamber, determining from the lamp housing data whether lamp housing crack is present, and responsive to determining lamp housing crack is present, at least one of triggering an alert or stopping processing of the process chamber.